Mathematical Proof of the Convex Hull Method for Predicting Anisotropic Crystal Etching Morphology
编号:85 访问权限:仅限参会人 更新:2025-11-10 11:44:28 浏览:39次 口头报告

报告开始:2025年11月23日 11:50(Asia/Shanghai)

报告时间:20min

所在会场:[S4] Parallel Session 4 [S4-2] Parallel Session 4-23 AM

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摘要
This study provides a rigorous mathematical proof of the equivalence between the convex hull method and the classical Wulff–Jaccodine (WJ) method in crystal etching morphology prediction. By establishing the correspondence between the convex hull of the reciprocal rate function and the intersection of half-spaces, we demonstrate that the morphological boundaries constructed by the two methods are completely identical. This result not only confirms the mathematical rigor of the convex hull method but also highlights its significant engineering value: by automatically selecting key directions and eliminating redundant constraints, the convex hull method substantially reduces computational complexity compared with traditional approaches. In modeling problems involving three-dimensional complex structures or high-dimensional rate functions, the convex hull method can markedly improve computational efficiency while preserving predictive accuracy. This feature renders it directly applicable to MEMS device design, crystal etching process optimization, and large-scale numerical simulations. Looking ahead, the method shows strong potential for extension to multi-faceted three-dimensional modeling and multi-physics coupled etching problems, thereby providing more reliable and efficient modeling tools for micro–nano fabrication.
关键词
Convex hull method, Wulff--Jaccodine method, Morphology prediction; Mathematical proof
报告人
MingYue Zhao
none Xidian University

稿件作者
MingYue Zhao Xidian University
Meng ZHAO Xidian University
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重要日期
  • 会议日期

    11月21日

    2025

    11月23日

    2025

  • 10月20日 2025

    初稿截稿日期

  • 11月23日 2025

    注册截止日期

主办单位
IEEE Instrumentation and Measurement Society
South China University of Technology
承办单位
South China University of Technology
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